Investigation of dynamic influences in tilted-wave interferometry

Aspherical and freeform lenses allow for compact optical systems have therefore gained high interest in optics. The interferometric measurement of these forms is a challenge, which the tilted-wave interferometer (TWI) has been developed. To evaluate uncertainty TWI, both static dynamic influence parameters to be investigated. In this work, we focus on influences data interferometer. end, individual as well their point insertion into process chain are identified. Then interferogram modelled Monte Carlo simulation. propagation different through path length differences (OPDs) also simulated, resulting variation OPDs estimated. Furthermore, from measured investigated comparison. analysis quantification along with its contributing sources important steps way towards full estimation form TWI.